Symposium 'Quantum Informatics - 2009'
   The International Conference Micro- and nanoelectronics 2009 (ICMNE-2009) with extended Session "Quantum Informatics" will be held during October 5-9, 2009 at the holiday hotel Lipki in Zvenigorod, Moscow region, Russia.

   It continues the series of International Conferences ICMNE-2003, "QI-2004", ICMNE-2005, "QI-2005", ICMNE-2007 and "QI-2007".
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   The International Conference Micro- and nanoelectronics 2009 (ICMNE-2009) including extended Session Quantum Informatics (QI-2009) will be held in October 5-9, 2009 at the holiday hotel Lipki, Zvenigorod, Moscow region, Russia. It will continue the series of All-Russian Conferences MNE-1999, MNE-2001, "QI-2002", and International Conferences ICMNE-2003, "QI-2004", ICMNE-2005, "QI-2005". ICMNE-2007, "QI-2007".

   Conference ICMNE is biannual event covering majority of area of micro- and nanoelectronic technologies, physics and devices. ICMNE-2009 is focused on recent progress in that area. The Conference will include the exhibition on equipment for micro- and nanoelectronics.


Micro-, nanoelectronic materials and films:

  • SOI, strained Si, SiGe, GaAs, GaN
  • Thin films, high-k dielectrics, low-k dielectrics
  • Metal gates, systems for contacts and metallization in nanoscale devices
  • Magnetic materials. Nanomagnetics
  • Nanotubes
  • Materials for optoelectronics and photovoltaic, metamaterials

Micro- and nanoelectronic technologies and equipment:

  • Sub-100 nm lithographies: DUV, EUV, Electron and Ion lithography, Nanoimprint.
  • Plasma processing for micro- and nanoelectronics.
  • Beam line and Plasma immersion Ion Implantation
  • CVD, MBE.


  • Processes monitoring, end-point detection
  • Metrology and characterization of micro- and nanostructures

Physics and technologies of micro- and nanodevices:

  • Nanotransistors: MOSFET, SET. Quantum dot memory and logic circuits.
  • Magnetic micro- and nanostructures
  • Spintronics
  • Superconducting micro- and nanodevices and systems
  • Molecular nanoelectronics
  • Devices of optoelectronics, photonics
  • Micro and nano-electromechanical systems (MEMS, NEMS).

Simulation and modeling:

  • Simulation of technological processes
  • Simulation and modeling of micro- and nanoelectronic devices
  • ICs modeling

Quantum informatics:

  • Quantum computer and complex quantum systems modeling (quantum computer problems, computer simulation of quantum systems, decoherence, entanglement)
  • Quantum information processing (quantum information, applications of quantum methods)
  • Quantum cryptography (quantum channels, nonlocality, security, error correction)

Organizers and Sponsors:

  • Russian Academy of Sciences (RAS). Division of Nano- and Information Technologies
  • Ministry of Education and Science of Russian Federation
  • Russian Foundation for Basic Research
  • Scientific Council Fundamental Problems of the Device Development for Informational, Computational and Controlling Systems (Russia)
  • Scientific Council on Physical and Chemical Fundamental of Semiconductor Material Science (Russia)
  • Institute of Physics & Technology of RAS (FTIAN), Moscow, Russia
  • Educational-scientific centre "MSU-FTIAN"
  • SPIE, Cooperating Organization
  • Institute of Semiconductor Physics (ISP) of RAS, Siberian Branch, Novosibirsk, Russia
  • Lomonosov's Moscow State University (MSU), Russia
  • Yaroslavl State University, Russia
  • Moscow Institute of Electronic Engineering (TU) (MIEE), Zelenograd, Russia
  • Micron Corp., Russia
  • INTEL, Inc.
  • Fraunhofer Institute of Integrated Systems and Device Technology (FhG IIS-B), Germany
  • Carl Zeiss AG, Germany
  • TechoInfo Ltd., UK
  • NT-MDT Co., Russia
  • NIX company, Russia


   The official language is English

Abstracts Submission:

   You can download a single page abstract template and requirements for full manuscript publication in the Downloads section of Conference website.    Please, submit the files with Abstracts to ICMNE-2009 Local Organizing Committee by address

Deadline for abstracts submission is August 10, 2009


   SPIE ( will publish the full text of papers in the separate volume of Proceedings of SPIE dedicated to ICMNE-2009 after Conference termination.

   The authors should prepare full manuscripts of papers according the rules of SPIE Proceedings (see Download section) and submit it by service MySPIE (link
Dear Authors: On the manuscript submission page, please ignore the text that reads, 'SUBMIT AN ABSTRACT OVERVIEW.' This is indeed the correct place to submit your full manuscript.

   Text of full manuscripts should be sent to SPIE by November 9, 2009. Please post the attached manuscript specifications and SPIE transfer of copyright form to the ICMNE-2009 Local Committee.

   Papers not presented at the ICMNE will not be published in the Proceedings.

   Contributions on the topics of the Conference are welcome from the academic community, universities as well as from the industry. About 80 contributions will be selected as oral presentations; all of others will be presented in form of poster. Program Committee will give preference to the papers which are containing results of recent original works consistent with Conference scope. Abstracts and full manuscripts should be written in clear and concise English.

   The Conference program will be comprised of invited and contributed papers. Contributed papers will be reviewed by the members of the Program Committee on the basis of submitted abstracts for their being in theme with the Conference, and for their scientific quality. The Program Committee will determine the session (oral or poster) on which the paper will be presented. Authors preferences are taken into consideration.

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