The International Conference “Micro- and nanoelectronics – 2009” (ICMNE-2009) with extended Session "Quantum Informatics" will be held during October 5-9, 2009 at the holiday hotel “Lipki” in Zvenigorod, Moscow region, Russia.
It continues the series of International Conferences “ICMNE-2003”,"QI-2004",“ICMNE-2005”, "QI-2005",“ICMNE-2007” and "QI-2007".
The International Conference “Micro- and nanoelectronics – 2009” (ICMNE-2009) including extended Session “Quantum Informatics” (QI-2009) will be held in October 5-9, 2009 at the holiday hotel “Lipki”, Zvenigorod, Moscow region, Russia. It will continue the series of All-Russian Conferences “MNE-1999”, “MNE-2001”, "QI-2002", and International Conferences “ICMNE-2003”, "QI-2004", “ICMNE-2005”, "QI-2005". “ICMNE-2007”, "QI-2007". Conference ICMNE is biannual event covering majority of area of micro- and nanoelectronics technologies, physics and devices. ICMNE-2009 is focused on recent progress in micro- and nanoelectronics technologies, physics and devices. The Conference will include the exhibition on equipment for micro- and nanoelectronics.
Official language of ICMNE-2009 is English.
Micro-, nanoelectronic materials and films:
SOI, strained Si, SiGe, GaAs, GaN
Thin films, high-k dielectrics, low-k dielectrics
Metal gates, systems for contacts and metallization in nanoscale devices
Magnetic materials. Nanomagnetics
Materials for optoelectronics and photovoltaic, metamaterials
Micro- and nanoelectronic technologies and equipment:
Sub-100 nm lithographies: DUV, EUV, Electron and Ion lithography, Nanoimprint.
Plasma processing for micro- and nanoelectronics.
Beam line and Plasma immersion Ion Implantation
Processes monitoring, end-point detection
Metrology and characterization of micro- and nanostructures
Physics and technologies of micro- and nanodevices:
Nanotransistors: MOSFET, SET. Quantum dot memory and logic circuits.
Magnetic micro- and nanostructures
Superconducting micro- and nanodevices and systems
Devices of optoelectronics, photonics
Micro and nano-electromechanical systems (MEMS, NEMS).
Simulation and modeling:
Simulation of technological processes
Simulation and modeling of micro- and nanoelectronic devices
Quantum computers: theory and experiments
Contributions on the topics of the Conference are welcome from the academic community, universities as well as from the industry. About 80 contributions will be selected as oral presentations; all of others will be presented in form of poster. The Conference program will be comprised of invited and contributed papers. The contributed papers will be reviewed by the members of the Program Committee on the basis of submitted abstracts for their being in theme with the Conference, and for their scientific quality. The Program Committee will determine the session (oral or poster) on which the corresponding paper will be presented. Contributed papers should present original investigations, and written in clear and concise English.
Deadline for abstracts submission is August 10, 2009